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A comparative study of ArF- and KrF-laser generated carbon plasmas has been performed under PLD conditions of amorphous diamond-like carbon (DLC) films. Gated-ICCD species-resolved imaging, luminescence spectroscopy and ion probe diagnostics have revealed distinct differences between the carbon plumes generated by ArF- and KrF-lasers. KrF-laser (6.7 J/cm2) irradiation produces a less energetic carbon...
A comparative study of ArF- and KrF-laser generated carbon plasmas has been performed under PLD conditions of amorphous diamond-like carbon (DLC) films. Gated-ICCD species-resolved imaging, luminescence spectroscopy and ion probe diagnostics have revealed distinct differences between the carbon plumes generated by ArF- and KrF-lasers. KrF-laser (6.7 J/cm 2 ) irradiation produces a less energetic...
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