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Polymer based fabrication and assembly processes for producing suspended antenna devices have been developed. Stacked high gain patch antenna devices have been assembled using millimeter thick micromachined SU8 polymer ring spacers. Thin polyimide substrates (125 mum) were used for supporting the radiating and parasitic patch elements. The SU8 based polymer rings were used to create air space between...
This paper presents chip scale investigation of polymer based bonding processes for producing microcavities for encapsulation of MEMS and other microscale devices. The polymer sealing rings were fabricated on the glass covers using the photosensitive BCB polymer and photolithography. They were bonded onto a variety of substrates including silicon substrates, aluminum coated substrates and glass substrates...
A cavity based high gain microstrip patch antenna with wide bandwidth is reported. The slot coupled antenna device was produced on a microwave PCB substrate with a suspended patch supported by a polymer ring structure. After the fabrication of the microstrip feed line and the coupling slot on the substrate and the patch on a polyimide film, two polymer rings of identical design were deposited on the...
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