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The complex refractive index and the layer thickness of nanocrystalline diamond films was determined by ex situ variable angle spectroscopic ellipsometry in the wavelength range of 191–1690nm. During the layer depositions argon, methane and hydrogen gases were used as source gases. The combined effect of argon addition and substrate bias was investigated in the microwave plasma assisted chemical vapor...
Optical properties of nanocrystalline and ultrananocrystalline diamond films were studied by ex situ variable angle spectroscopic ellipsometry. The films were prepared by Microwave Plasma Enhanced Chemical Vapor Deposition method. In the experiments Ar, CH 4 , and H 2 gases were used as source gases. Elastic recoil detection analysis was applied to measure the hydrogen content of the...
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