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Stoichiometric lithium niobate (SLN) thick films were deposited on z-cut LiNbO 3 using the sol-gel method from a precursor solution containing various polyvinyl alcohol (PVA) concentrations and their characteristics were investigated. The film thickness increases linearly and the roughness decreases with the increase in PVA concentration. The refractive indexes of the films prepared with PVA...
An electron-beam-excited plasma (EBEP) apparatus has the remarkable characteristic that the electron-energy-distribution function (EEDF) can be controlled directly, thus electron-beam energy and density are controlled independently by the accelerating voltage V A and the discharge current I D in the EBEP. As an application of the EBEP, TiO 2 films were deposited varying V ...
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