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Polymeric materials and their applications are plentiful in the world around us. In its simplest form, a polymer molecule is one that is composed of a large number of repeating units of identical structure, termed the monomer. Bulk polymeric materials, often termed plastics, may consist of one or more types of polymer molecules and they might also include various additives, fillers, and cross-linking...
It is known to those familiar with parylene that it is has very unique deposition kinetics. The deposition rate increases as the substrate temperature is decreased, which is the opposite of most CVD reactions. The deposition rate increases as the monomer pressure in the chamber is increased, which is more typical of a CVD reaction. It is also known that there is a minimum pressure below which no deposition...
Overview In this chapter we will present some details on the properties of parylene family polymers. We will also present data from parylene-N films deposited in the example deposition system as well as the method and equipment used to perform the measurements. This should provide enough information to understand the application space for parylene films. Table 6.1 gives a list of the typical...
The starting material for the deposition of parylene film is a dimer in the form of a white powder. This dimer can be purchased through a number of companies in the US and abroad, including Para Tech Coating, Inc. (visit http://www.parylene.com) and Speedline Technologies (visit http://www.scscookson.com). The dimer for parylene-N, which is also called di-para-xylylene and [2,2]paracyclophane was...
In this chapter we will present a step-by-step procedure that one would use to deposit parylene using a typical deposition system. The steps for your deposition will most likely deviate from these but they are not meant to be followed exactly but more to give the general understanding of the process of parylene deposition.
The main pieces of a parylene CVD system are the sublimation furnace, the pyrolysis furnace, the deposition chamber and the vacuum pumping system. There are other necessities as well, like a deposition chamber, pressure measurement system and heating tapes to keep areas of the system from having dimer or polymer deposited on them. Of course one also wants easy access to load the dimer, as well as...
In addition to the Parylene family, there are several classes of polymer that have been shown to form thin film by evaporation or via chemical vapor deposition routes. Among them, rigid-rod aromatic polymers, due to their structure, possess several very attractive properties that have a great potential for many applications such as protective coating. They possess high thermal stability, high glass...
Chemical Vapor Deposition Polymerization - The Growth and Properties of Parylene Thin Films is intended to be valuable to both users and researchers of parylene thin films. It should be particularly useful for those setting up and characterizing their first research deposition system. It provides a good picture of the deposition process and equipment, as well as information on system-to-system variations...
The structure of the complex trans-[Ru(η 2 -H 2 )(H)(dppe) 2 ][BPh 4 ] (1), dppe = PPh 2 CH 2 CH 2 PPh 2 , has been determined by single-crystal X-ray diffraction at 123 K and neutron diffraction at 12 K. The core of the complex has a distorted octahedral geometry about ruthenium with the dihydrogen ligand trans to hydride and eclipsing...
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