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An interaction system based on integral imaging is presented. Two users are respectively in front of a 3D display system and communicate together. A half mirror enables to record the viewer's face with a camera while the 3D content is displayed. The 3D data recorded by the camera are then sent to the display system of the other user. In this way users can see each other in 3D and real eye-contact...
We report on printed silicon photonic crystal broadband membrane reflectors (MRs) based on laser interference lithography (LIL) patterning. Single-layer photonic crystal membrane which was formed by the LIL technique on a silicon-on-insulator (SOI) wafer was transferred by the contact printing method using the polydimethylsiloxane (PDMS) stamp on a glass substrate. These broadband silicon-MRs show...
In mask inspection of extreme ultra-violet lithography, defect sizes and locations are critical factors on semiconductor production. This paper addresses a simulated solution of phase retrieval method to reduce a fine dust suspended in the air or on the CCD surface. To reduce such noise, we introduce an image enhancement method. Experimental result shows the contaminated materials such as fine dust...
We report on organic nonvolatile memory devices, using pentacene as the active semiconductor layer and gold nanoparticles (Au NPs) array as charge storage elements. An effective and facile fabrication by self-assembly of Au NPs at a toluene/water interface with ethanol as the inducer is used for the forming of gold nanoparticles (Au NPs) monolayer. The organic memory devices exhibited good memory...
The field emission characteristics of patterned carbon nanotubes whose average diameter is 16nm cathodes on substrates with surface treatment were investigated. The surface treatment of the substrate was performed by nickel electroless plating. Carbon nanotubes were patterned on the surface treated substrate with radius of 200µm through conventional photolithography process. It was revealed that the...
Field emission X-ray sources have been developed by using carbon nano-tubes (CNT) for diverse applications in fields of biological, medical and material diagnostic technologies. For such applications, it is required to improve the efficiency of field emission for obtaining higher X-ray flux. Previous studies have reported that several parameters, including the aspect ratio of CNT, the inter-tube distance...
Multi-walled carbon nanotubes were fabricated KOVAR substrates using electrophoretic deposition (EPD). The surface treatments of the substrate were performed by palladium coating process which is an activation procedure for electroless plating. Through the surface treatments, the roughness of the surface increased and cathodes which have high roughness factor showed better field emission characteristics...
The inverse Fourier transform is performed on the focused aerial image to find the time-domain representation from the frequency domain. In this paper we proposed a modified hybrid input-output algorithm for phase retrieval to generate the computed image satisfies the object-domain constraints. Generally the iterations continue until the computed Fourier transform satisfies the object-domain constraints...
Hermetic-sealed field-emission X-ray sources with an anode voltage and current of 70 kV and 0.5 mA have been developed using an anisotropic focusing electron lens structure for an isotropic focal spot. The anisotropic focusing of an electron beam was achieved using an electrostatic electron lens with anisotropic aperture geometry integrated in a gate (or grid) electrode. The anisotropic geometry has...
We report the fabrication method of suspended bridge type nanoelectromechanical system (NEMS) resonator for high quality factor (Q-factor) and increase in resonance frequency beyond the ultra-high frequency (UHF) by laser interference lithography (LIL) using silicon-on-insulator wafer. LIL is capable of a fast nano-patterning over a large area and does not require a mask. In fabricating a suspended...
We demonstrated a plasmonic color filter adopting laser interference lithography technology. Nano scaled hole arrays were obtained with a regular spatial period through the whole glass substrate area of 2.5 cm × 2.5 cm.
We fabricated a gas sensor for the detection of a carbon monoxide (CO) and ammonia (NH3) gas using single walled carbon nano tubes (SWNTs) and polyaniline(PANI) composite. The SWNTs were dispersed in sodium dodecyl sulfate (SDS) and were applied over the electrodes of an interdigitated electrodes (DDEs) by photolithography. By using this method, the active area for gas sensing can be defined more...
We fabricated a carbon nanotube based gas sensor for the detection of CO and NH3 mixed gas. Conventional photolithography technology was applied for the localization of sensing materials and the sensor fabrication. Single walled carbon nanotubes were dispersed in Sodium Dodecyl Sulfate (SDS) solution. The whole surface was covered by a photoresist except window areas between two electrodes. Carbon...
Measurements of the variation of vacuum level inside of field emission device when electron is emitted from carbon nanotubes (CNT) by electric field were performed. Multi-walled carbon nanotubes (MWCNT) sensor packaged with a vacuum device is used to measure the degree of a vacuum until the end of the vacuum device life. It was found that the electrical properties of MWCNTs altered with the degree...
As the real sample diagnosis using resonance-based microcantilevers, a simple method is strongly suggested that capture probe immobilized on the cantilever directly hybridize with nanoparticles conjugated detection probe. Two different dimensions of microfabricated piezoelectric cantilevers and two different sizes of nanoparticles were used in this experiment. As a result, the most suitable conditions,...
This paper presents a numerical analysis and experimental study on failure of the spatial optical modulators (SOM) package and its preventing from thermal damage. The SOM package has been developed for projection displays. Most heat sources of the SOM package were mounted on a glass plane that was coated with SiO2 and TiO2 for optical performance. The heat sources were distributed by entering the...
Carbon nanotube (CNT) integrated with biological functionalities is expected to be one of the most promising field in future biomedical applications. CNT material with prominent properties along with application of micro fabrication technology make possible enormous application potential sensors with high resolution, more accurate, higher sensitivity and micrometer size. One of these applications,...
We present the fabrication process and the characteristics of a flexible tactile sensor by silicon micromachining, polymer processing and packaging technologies. The fabrication process for the tactile sensor was composed of in the fabrication of sensor chips and their packaging on the flexible printed circuit board (FPCB). The variation rate of resistance was about 4.6%/N when normal force was applied...
This paper describes the design, manufacture and measure of tactile sensor with piezoresistive detection of deflection. The tactile sensor array was constructed with a fully integrated complementary metal oxide semiconductor (CMOS) fabrication process and bulk micromachining for the sensing structures. Electrical connections were made between the flexible printed circuit boards (FPCB) and the sensor...
Metal organic vapour phase epitaxy has been investigated for growth of Bi2Te3 and Sb2Te3 films on (001) GaAs substrates using trimethylbismuth, triethylantimony and diisopropyltelluride as metal organic sources. High resolution TEM and X-ray diffraction patterns revealed that films had single crystalline phases with a preferential c-orientation and layered structures resulting from the van der Waals...
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