Search results for: Si-Fu Chen
Materials Science in Semiconductor Processing > 2017 > 66 > C > 39-43
Materials Science in Semiconductor Processing > 2017 > 59 > C > 1-4
IEEE Transactions on Plasma Science > 2013 > 41 > 10-1 > 2637 - 2640
Materials Science in Semiconductor Processing > 2017 > 66 > C > 39-43
Materials Science in Semiconductor Processing > 2017 > 59 > C > 1-4
IEEE Transactions on Plasma Science > 2013 > 41 > 10-1 > 2637 - 2640