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We demonstrate here an oxide memory (OxiM) transistor as a new type of ferroelectric-gate field-effect transistor (FeFET), provided with a dual (top and bottom) channel, which can memorize channel conductance with a dynamic range exceeding 104. This new transistor consists entirely of the following oxide-based thin films: SrRuO3 (bottom gate electrode); Pb(Zr, Ti)O3 (ferroelectric); ZnO (semiconductor);...
In this study, we demonstrate an Oxide Memory (OxiM) transistor as a new type of FeFET, provided with dual (top & bottom) gate, which can memorize the channel-conductance with the dynamic range over 105. By using serially-connected OxiM transistors, we were successful in fabricating NAND memory circuit with a retention time over 3.5 months. Since the ferroelectric polarization can be modulated...
A capacitive micromachined ultrasonic transducer (CMUT) was fabricated using a standard 0.25-mum CMOS backend-of-line process. By adopting the planarization of dielectric material between the upper and lower electrodes by chemical mechanical polishing (CMP), we achieved a time-dependent dielectric breakdown (TDDB) lifetime exceeding 10 years at a DC stress voltage of 192 V. In the case of DC and AC...
Program and erase operation on NAND-string of Bit-Cost Scalable (BiCS) flash memory has been successfully achieved. High boost efficiency of floating pillars and ONON (block oxide/charge SiN/tunnel oxide/tunnel SiN) structure as a memory film stack improve disturbance characteristics enough to realize tera-bit density of three dimensional flash memory. BiCS flash memory has become a more promising...
The charging property of dielectrics between the upper and lower electrodes in capacitive micro-machined ultrasonic transducers (CMUTs) was investigated. In particular, the dependence of the capacitance of a CMUT cell on DC voltage (i.e., C-V curve) was measured before and after DC or DC+AC voltage stress was applied between the two electrodes. The charging was evaluated from the C-V curve shift....
The polarization dependence of resonance wavelength of LPFG utilizing the photoelastic effect has been investigated based on the simple model. Our model for LPFG is in good agreement with the experimental results.
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