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This paper presents a monolithic three axial electrochemical micro seismic sensor. In response to the vibration along different axes, the outputs of four sensing units are different and through the decoupling of the differences between them formed by different vibration, the vibration along a certain axis can be detected from the mixed one. Because of the decoupling sensing mechanism with four sensing...
A novel sensing and estimation scheme is introduced as an integrated part of a micro-stage based calibration method for a MEMS gyroscope. The proposed sensing scheme combines a periodically updating analog sensor with an event-based threshold sensor. A first derivative of Gaussian filter is applied to the threshold sensor signal to detect threshold crossings. A Kalman filter with the proposed sensing...
Research on MEMS Resonators began over 50 years ago. In just the last 10 years, there has been a series of important technological developments, and (finally!) success at commercialization. The presentation will highlight some key milestones along this path, describe some of the critical technology steps, and outline some of the important non-technological events within SiTime - all of these factors...
We report on a CMOS microelectrode array system chip for recording and stimulation of electrogenic cell cultures and tissues, featuring a sensing area of 8.09 mm2, composed of 26'400 electrodes at 17.5 µm pitch. A user-configurable selection of the electrodes can be routed to 32 stimulation units and to 1024 recording channels with 2.4 µVrms input-referred noise and 10-bit 20-kS/s A/D conversion....
Compressed sensing (CS) is an emerging signal processing technique that enables sub-Nyquist sampling of sparse signals such as electrocardiogram (ECG), electromyogram (EMG), and electroencephalogram (EEG) bio-signals. Future CS signal processing systems will exploit significant time- and/or frequency-domain sparsity to achieve ultra-low-power bio-signal acquisition in the analog, digital, or mixed-signal...
This paper reports experimental results and molecule-modeling analysis on origin of specific molecule-adsorption induced surface-stress. Using self-sensing piezoresistive micro-cantilevers, specific surface-adsorption experiment for a group of relative molecules is implemented, with the generated surface-stress recorded. Compared with the balanced space of self-assembled monolayer (SAM) on Au-(111)...
In this paper, a bulk micro machined lateral-axis TFG (tuning fork gyroscope) with improved architecture and combined mechanism sensing capacitors is reported. The combined sensing capacitors make the TFG have high sensitivity and good linearity even under wide input range and fabrication imperfection. Moreover, the decoupled comb drive, together with the improved architecture, can efficiently decouple...
In this study, we design and present the novel wearable system with the interactive posture caption and recognition functions based on the non-vision over the ZigBee wireless sensor network (ZigBee-WSN). There are two type sensors, 3-axis accelerometer and clip type, to be employed in our wearable system. These sensors are arranged on user's four limbs such that the posture information can be gathered...
This paper presents a new 2-stage memory write scheme for pulse width modulation digital pixel sensors. The proposed scheme utilizes the characteristics of grey-code counter and partitions a single data write operation into two separated operations such that a portion of pixel embedded memory can be moved out of the pixel to significantly increase the fill factor and reduce the silicon area of the...
Zinc oxide (ZnO) and its ternary alloy magnesium zinc oxide (Mg xZn1-xO) are piezoelectric materials for high quality factor bulk acoustic wave (BAW) resonators operating at GHz frequencies. MgxZn1-xO thin film BAW devices built on Si substrates are particularly attractive for integrating piezoelectric MgxZn1-xO with the main stream semiconductor devices and circuits. In this paper, we report single-mode...
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