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Interlayer cooling removes the heat dissipated by vertically stacked chips in multiple integrated fluid cavities. Its performance scales with the number of dies in the stack and is therefore superior to traditional back-side heat removal. Previous work indicated that pin-fin arrays are ideally suited as through-silicon-via-compatible heat transfer structures. In addition, four-port fluid-delivery...
The following study concentrates on two-phase flow boiling of refrigerant R134a inside two similar copper multi-microchannel heat sinks, one of which was designed for singlephase water cooling of microprocessors. The two-phase heat sink was composed of 100 parallel microchannels, 100 μm wide, 680 μm high, 15 mm long with 72 μm-thick fins, and 63 parallel microchannels. Base heat fluxes and channel-based...
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