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A high-mode resonant silicon cantilever sensor is developed for detection of airborne nanoparticles (NPs) by monitoring the change in resonant frequency induced by an additional trapped NPs mass. A piezoresistive bridge is integrated in the cantilever for signal sensing. An electrostatic method is employed to trap the NPs on the cantilever surface. The experimental results indicate that the cantilever...
In this paper, a silicon resonant cantilever sensor is used for monitoring airborne nanoparticles (NPs) by detecting the resonant frequency shift that is directly induced by an additional NPs mass deposited on it. A piezoelectric stack actuator and a self-sensing technique using a piezoresistive strain gauge are involved in the sensor system in order to actuate and detect the oscillation of cantilever...
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