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This paper reports an improved-sensitivity resonant accelerometer with fishbone-shaped resonators of higher vibration modes. Different from conventional resonant accelerometer integrating with low-order vibrating resonators, our prototype utilizes higher-mode fishbone-shaped resonators based on the principle that higher vibration modes have a higher frequency sensitivity. The proposed fishbone-shaped...
In this paper, we firstly present a MEMS (microelectromechanical systems) piezoelectric in-plane resonant accelerometer with two-stage micro-leverage mechanism. Double ended tuning fork (DETF) resonators are actuated and sensed by piezoelectric transduction with aluminum nitride (AlN). Optimized configuration of DETF resonators and two-stage micro-leverage mechanism are proposed to enhance sensitivity...
A two-axis in-plane capacitive accelerometer fabricated on silicon-on-insulator (SOI) is developed. With each stationary electrode separated to two sub stationary electrodes by refilled isolation trench, the presented accelerometer has compact differential capacitance electrodes to improve capacitance sensitivity per sensing area. In addition, the overlap area-changed capacitor enables good linearity...
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