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This paper reports a micromachined metamaterial which is tunable between anisotropic and isotropic state. The tuning rescales the metamaterial lattice constant instead of changing the element structure. It realizes a resonance independent change of transmission and tunes the transmitted phase of polarized THz wave. The transmission decreases from 15% to 0 for circularly polarized wave and tunes transmitted...
A tunable laser based on double-ring external resonant cavity is designed, fabricated and tested. The double-ring resonator external cavity consists of a silicon waveguide ring resonator, a p-i-n doped silicon ring resonator, and a superluminescent diode (SLED). The laser is fabricated on a SOI wafer and the wavelength is tuned by injecting electrical currents to p-i-n structures. In the experiment,...
A dynamic-stress analysis method, based on time-resolved micro Raman spectroscopy, has been developed for reliability studies of microelectromechanical systems. This novel technique is illustrated by measuring temporally and spatially resolved stress maps of a piezoelectrically actuated silicon microcantilever when driven at its first- (6.094 kHz) and second-order (37.89 kHz) resonant frequencies...
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