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Mathematical simulations were used to evaluate an iterative, regularized matrix approach to the recovery of composition depth profiles from ARXPS data containing 1, 3, 5, 7 or 9% noise. The iterative inversion was intended to remove unphysical negative concentration values from the depth profile and to provide some degree of profile sharpening at layer interfaces. It was found that while this procedure...
Angle‐resolved X‐ray photoelectron spectroscopy (ARXPS) data taken on a polystyrene film exposed to a nitrogen plasma are interpreted by the fitting of regularized depth profiles. Three ways of measuring the goodness of fit are compared—the χ2 statistic with variances drawn from the raw spectra, the χ2 statistic with variances drawn from the concentration figures obtained from the data analysis, and...
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