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Thin diaphragm play an important role in highly sensitive MEMS piezoresistive pressure sensor for intracranial pressure measurement. The thinness of graphene was utilized in this pressure sensor to maximize the sensitivity of the ICP pressure sensor. However a very thin diaphragm can cause a pressure nonlinearity performance problem due to the residual stresses. This present paper study the effect...
The advancement in MEMS technology has triggered the development of small sensing devices such as intracranial pressure sensor. As the intracranial signal is a pulsating type, the sensor must be sensitive enough to detect these changes. Hence, the important parameters of intracranial pressure sensor are the sensitivity and linearity. At present, the sensitivities were within the range of 2 µV/V/mmHg...
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