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This paper reports an integrated injection-locked laser constructed using microelectromechanical systems (MEMS) technology, which achieves a large wide locking range of 43 nm with an average SMSR of 32 dB.
This paper reports a theoretical and experimental study of a MEMS injection-locked laser (ILL). The micromachined injection-locked laser consists of a MEMS tunable laser (master) and a Fabry-Perot multimode laser (slave) that is integrated by using deep RIE processes onto a single chip. Based on the experimental results, hysteresis property in asymmetrical tuning curve is observed and optical bistability...
The paper presents a thermo-optic tunable laser that makes use of a micromachined etalon to form the external cavity. The wavelength tuning is obtained by the thermo-optic effect of the silicon material. In experiment, a wavelength tuning range of 14 nm is demonstrated by applying a heating current of 18.7 mA to a deep-etched silicon etalon of 206 mum wide. In the dynamic test, this laser measures...
This paper presents a micromachined tunable laser that utilizes a silicon optical tunneling structure to tune both the polarization state and the wavelength of the laser output. The device is fabricated on silicon-on-insulator wafer using deep reactive ion etching. In experiment, the wavelength and the polarization are tuned by heating up the silicon optical tunneling structure via the thermo-optic...
This paper presents a MEMS based tunable coupled-cavity laser (CCL), which employs a deep-etched parabolic mirror to adjust the gap of the CCL for optimal phase match. In experiment, such mirror measures an initial coupling efficiency of 70.5% and a low variation (<5 %) of the efficiency even when the mirror is translated by 20 mum, which is ideal for the CCL to change the cavity length (i.e.,...
This paper presents the theoretical and experimental results of an injection-locked laser (ILL) device constructed by the MEMS technology to provide a wavelength-stabilized laser source for the applications of accurate time keeping. The device mainly consists of a MEMS tunable laser and a FP laser chip by a scheme of external injection. The combination of the injection locking and the MEMS technology...
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