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This paper reports a NEMS spectrometer-on-a-chip, which integrates fiber-waveguide coupler and photo detector on a single silicon chip. Spectrometer based on Fourier transform, for the first time, has been miniaturized into a waveguide based silicon photonic chip. The on-chip spectrometer is fabricated by nano-silicon-photonic fabrication processes. It also eliminates moving parts and confine light...
This paper reports a NEMS integrated photonic system, which integrate tunable laser, optical cross correct and variable optical attenuators. The NEMS integrated photonic system is fabricated with nano-silicon-photonic fabrication technology to integrate various functions in a single silicon photonic circuit chip. The high light-confinement capability of the nano-silicon waveguides guarantees superior...
A nano-electro-mechanical systems (NEMS) based optical actuator driven by optical gradient force is demonstrated. The actuator consists of two ring resonators and one mechanical arc. The resonating light inside the actuation ring generates optical gradient force on the mechanical arc and induces a displacement. The actuation ring is an integrated electro-optics modulator which tunes the Q-factor of...
This paper reports a photonic thermocouple based on an ultra-compact Michelson Interferometer (MI) for on-chip temperature sensing. All components are fabricated by using standard CMOS process. Compared with the traditional temperature sensors based on electronics, this proposed photonics thermocouple has more compact size (40 μm × 70 μm), high sensitivity (113.72 pm/K), cost-effective, and immunity...
This paper reports an optomechanical transducer for photon energy detection on the silicon-photonics platform. The photon energy is enhanced by a ring resonator and converted into mechanical energy via optical gradient force. An integrated electron tunneling displacement sensor is used to detect the photon-induced mechanical deformation on-chip. Compared with the traditional photon energy detection...
This paper presents an electrostatic controlled near-field nano-opto-probe (NOP), which has high potential for nano-particle trapping, transport and release. Infrared light trapping is utilized to avoid possible optical damage to the biological particles. Within the scheme of nano-electro-mechanical systems (NEMS), this NOP combines the advantages of compact integration, precise nm-scale positioning...
In this paper, an optical switch driven by the optical force is demonstrated based on Nanoelectromechanical system (NEMS) technology. The switch consists of a Mach-Zehnder interferometer (MZI) and a ring resonator. One of the MZI arms is suspended to enable optical switching by optical force induced displacement. The optical force is introduced by injecting a control light into the ring resonator...
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