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This paper reports a micromachined metamaterial which is tunable between anisotropic and isotropic state. The tuning rescales the metamaterial lattice constant instead of changing the element structure. It realizes a resonance independent change of transmission and tunes the transmitted phase of polarized THz wave. The transmission decreases from 15% to 0 for circularly polarized wave and tunes transmitted...
A tunable laser based on double-ring external resonant cavity is designed, fabricated and tested. The double-ring resonator external cavity consists of a silicon waveguide ring resonator, a p-i-n doped silicon ring resonator, and a superluminescent diode (SLED). The laser is fabricated on a SOI wafer and the wavelength is tuned by injecting electrical currents to p-i-n structures. In the experiment,...
This paper reports a miniature MEMS tunable dual-wavelength laser by integrating a gain chip, a beam splitter, and a pair of Bragg reflectors which has different periods. In the experiment, simultaneous two wavelengths emissions are observed with a thermo-optic tuning range of 1574.7 nm to 1578.6 nm and 1576.1 nm to 1582.6 nm, respectively.
This paper reports a theoretical and experimental study of a MEMS injection-locked laser (ILL). The micromachined injection-locked laser consists of a MEMS tunable laser (master) and a Fabry-Perot multimode laser (slave) that is integrated by using deep RIE processes onto a single chip. Based on the experimental results, hysteresis property in asymmetrical tuning curve is observed and optical bistability...
This paper reports a new design of MEMS variable optical attenuator (VOA) that makes use of a pair of parabolic mirrors as the retro-reflector in the horizontal plane and a normal fiber as the rod lens to focus in the vertical plane. It is advantageous over the conventional co-axial VOAs since it allows the fibers to be arranged in parallel and is thus convenient for the packaging. The parabolic mirrors...
This paper presents a MEMS based tunable coupled-cavity laser (CCL), which employs a deep-etched parabolic mirror to adjust the gap of the CCL for optimal phase match. In experiment, such mirror measures an initial coupling efficiency of 70.5% and a low variation (<5 %) of the efficiency even when the mirror is translated by 20 mum, which is ideal for the CCL to change the cavity length (i.e.,...
This paper presented the theoretical and experimental studies on a new mechanism of real pivot by use of a double-clamped beam. Comparison with the conventional virtual pivot formed by a cantilever beam, such real pivot provides large rotation angle and small position shift, which is key for the MEMS tunable lasers to obtain continuous wavelength tuning over a wide range. In experiment, the real pivot...
This paper reports a micromachined reflective-type MEMS power regulator (PR) for optical networks. The PR consists of an improvingly designed variable optical attenuator (VOA), which has superior performance as compared with the conventional flat-mirror reflection-type and shutter-type VOAs. It uses an elliptical mirror as the movable reflector. It achieves a large attenuation range at low insertion...
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