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In the last few years, many efforts have been made looking for the improvement of the DC and RF performance of MOS transistors. In this scope, Schottky-Barrier transistors appear as very interesting alternative to conventional devices. In this paper we present the non-linear behavior of dopant segregated n-type SB-MOSFETs with 180 nm channel length.
This paper presents fully-depleted short-channel Schottky barrier (SB) MOSFETs with silicidation induced dopant segregation of B at a low temperature of 450degC. The integration of nickel silicide combined with either As or B segregation significantly improves the switching performance of dopant-free SB-MOSFETs. The implantation dose dependence of the device characteristics is studied on long channel...
High performance Schottky barrier MOSFETs require metallic source/drain contacts with very low Schottky barrier heights. This investigation focuses on barrier lowering via silicidation induced dopant segregation at the NiSi/Si interface with particular emphasis on the influence of dopant activation prior to Ni-silicidation. Diodes with activated dopants reveal significantly lower Schottky barrier...
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