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This paper presents an on-chip miniaturized MEMS tunable laser, with a 3-dimensional micro coupling system to improve the coupling efficiency and side mode suppression radio. The prototype is fabricated on an SOI wafer by DRIE process. It obtains a coupling efficiency as high as 76.5%. It offers an improved tuning over a range of 48 nm. Compared with other hybrid-integrated tunable lasers, the compact...
This paper reports a 3-dimensional (3D) micro-optical coupling system for improving coupling efficiency in the Littrow configured micro-electro-mechanical system (MEMS) tunable lasers. In the coupling system, an optical fiber acts as a rod lens for light convergence in the vertical plane, while a deep-etched silicon parabolic mirror confines the light in the horizontal plane. Compared with previous...
This paper reports a miniature MEMS tunable dual-wavelength laser by integrating a gain chip, a beam splitter, and a pair of Bragg reflectors which has different periods. In the experiment, simultaneous two wavelengths emissions are observed with a thermo-optic tuning range of 1574.7 nm to 1578.6 nm and 1576.1 nm to 1582.6 nm, respectively.
This paper presents a terahertz tunable metamaterial filter using microelectromechanical systems (MEMS) structures. The metamaterial unit cells are tuned by micromachined comb-drive. The metamaterial slab works as a notch filter of THz region, which can lower the transmission of interest frequency down to -70 dB. In the experiment, it measures the tuning range of filter frequency from 3.32 to 3.80...
This paper reports an integrated injection-locked laser constructed using microelectromechanical systems (MEMS) technology, which achieves a large wide locking range of 43 nm with an average SMSR of 32 dB.
This paper presents a digital mirror for tunable laser wavelength selection using microelectromechanical systems (MEMS) technology. The digital mirror which has discrete reflection spectrum is totally different compared to the current broadband mirrors MEMS tunable lasers . The reflection of the digital mirror can be tuned by digital pumping signals which promise fast output wavelength switching....
This paper reports a theoretical and experimental study of a MEMS injection-locked laser (ILL). The micromachined injection-locked laser consists of a MEMS tunable laser (master) and a Fabry-Perot multimode laser (slave) that is integrated by using deep RIE processes onto a single chip. Based on the experimental results, hysteresis property in asymmetrical tuning curve is observed and optical bistability...
This paper presents an optical logic NOR gate constructed by two MEMS tunable lasers and a Fabry-Perot (FP) laser chip. The key idea is that the FP chip is directly controlled by two tunable optical signals via the physical mechanism of injection locking. Compared with other fiber-based gating mechanisms, this logic operation only depends on the optical power without need for accurate phase matching...
This paper presents a movable gold waveguide for switching surface plasmon polariton (SPP) using the MEMS technology, which provides a simple but effective way to route the SPP. The input waveguide is patterned on top of a cantilever beam, and can be actuated to align the input to one of the two output gold waveguides fixed on the substrate. The gold waveguides are 2- mum wide and 40-nm thick patterned...
This paper presents a tuning mechanism to provide an adjustable virtual pivot for MEMS tunable lasers, which eliminates the mode hopping problem associated with conventional Littrow lasers. The key idea is to attach the two ends of the blazed grating to two separate translational actuators. The relative displacements of the actuators can be used to translate and/or rotate the blazed grating in a controllable...
This paper presents a MEMS tunable dual-wave length laser, which simultaneously achieves wide tuning range and two-longitudinal-mode emission. The construction of this laser is based on Littman external cavity configuration. The key point is to use two micro-mirrors to select two different wavelengths at their independent diffraction modes, and the emission of both wavelengths will be collected through...
This paper presents the theoretical and experimental results of an injection-locked laser (ILL) device constructed by the MEMS technology to provide a wavelength-stabilized laser source for the applications of accurate time keeping. The device mainly consists of a MEMS tunable laser and a FP laser chip by a scheme of external injection. The combination of the injection locking and the MEMS technology...
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