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In this paper, we investigate the electrical behavior of TSV with increasing temperatures (25-150°C). TSV capacitance, leakage current and TSV resistance with varying temperatures are reported. TSV C-V characteristics are analyzed to extract the oxide charges. It is confirmed that the depletion behavior of TSV can be exploited to reduce TSV capacitance even at higher temperatures. In addition, lumped...
We investigate key design issues of a low-cost 3D Cu-TSV technology: impact of TSV on MOS devices and interconnect, reliability, thermal hot spots, ESD, signal integrity and impact on circuit performance. We experimentally verify their importance and propose changes in current design practices to enable low-cost systems.
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