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Ion electron emission microscopy (IEEM) can provide an alternative approach to microbeams for micrometric characterization of the sensitivity map to single event effects (SEE) of an electronic device. In IEEM technique, a broad (not focused) ion beam is sent onto the device under test (DUT). Secondary electrons emitted by the target surface during each ion impact are collected and focused by a system...
To map out device sensitivity with submicrometric resolutions it is traditional to use a microbeam. In recent years ion electron emission microscopy (IEEM) is emerging as an innovative method for device characterization. An advanced implementation of this instrument is under development at the SIRAD irradiation facility at the Legnaro national laboratory (LNL). The aim of this work is the final test...
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