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In this paper, the electron beam vacuum coating method was used to coat a SiO2 film on an MgAl2O4 spinel substrate. The thickness of the coating was aimed to be 925 nm based on the physics of the antireflection coatings. Atomic force microscope images revealed that the coated silica was 880 nm thick, which is close to the aimed theoretical thickness and had 2.11 nm roughness. It could enhance the...