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In article number 1700639, Liang He, Liqiang Mai and co‐workers, develop a novel microfabrication process to obtain an alternating stacked MoS2@graphene/carbon and carbon nanotubes/carbon microelectrodes‐based microsupercapacitor. The energy and power performance of the fabricated microsupercapacitor are enhanced by the unique alternating stacked structures. This carbon‐MEMS‐based microfabrication...
A novel process to fabricate a carbon‐microelectromechanical‐system‐based alternating stacked MoS2@rGO–carbon‐nanotube (CNT) micro‐supercapacitor (MSC) is reported. The MSC is fabricated by successively repeated spin‐coating of MoS2@rGO/photoresist and CNT/photoresist composites twice, followed by photoetching, developing, and pyrolysis. MoS2@rGO and CNTs are embedded in the carbon microelectrodes,...
In the last decade, pyrolyzed-carbon-based composites have attracted much attention for their applications in micro-supercapacitors. Although various methods have been investigated to improve the performance of pyrolyzed carbons, such as conductivity, energy storage density and cycling performance, effective methods for the integration and mass-production of pyrolyzed-carbon-based composites on a...
This paper reports the fabrication and characterization of carbon nanotube (CNT)/carbon composite microstructures with higher Young's modulus than that of pyrolysis carbon. Hybrid microstructures consisted of CNT composite and Si are successfully fabricated by micromolding and pyrolysis of a resist (SU-8) mixed with CNTs. The photoresist mixed with CNTs is filled into a Si micromold fabricated by...
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