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A micro‐electro‐mechanical‐based 3‐C borehole gravimeter has been developed in China for mineral and hydrocarbon exploration. The 3‐C borehole gravimeter is composed of a three‐axis gravity sensor chip based on a deep silicon etching technique, high‐precision capacitive displacement sensing and weak signal detection circuitry. The gravity‐sensing chip is a silicon‐based integrated spring‐mass block...
The Newtonian gravitational constant G, which is one of the earliest fundamental constants introduced by human beings, plays an important role in cosmology, astrophysics, geophysics, metrology, and so on. In spite of the measurement of G having a relative longer history and more than 200 measurement results having been obtained during the past 200 years, G still remains the least precisely known among...
This paper reports on an in-plane nano-g MEMS accelerometer using periodic-sensing-array capacitance displacement transducer. The parasitic capacitances and fringe effect are proved to have great influences on sensitivity by simulation. Benefiting from the large proof mass and optimized displacement transducers, the experimentally measured noise limited resolution is 30ng/√Hz at 1Hz, which is among...
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