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We successfully developed fabrication process of 16nm InGaAs channel multi gate MOSFETs with regrown source and drain by using MOVPE. This device showed 707 µA/µm of Id.max and 498 µS/µm of gm.max. On-off ratio was 103 @ Vd = 0.5V.
Triangular In0.53Ga0.47As-OI nMOSFETs with smooth (111)B side surfaces on Si have been successfully fabricated. Triangular shaped channels with bottom width down to 30 nm were formed by MOVPE growth on narrow InGaAs-OI fins. The formed (111)B surface was demonstrated to provide higher mobility compared with reference InGaAs-OI tri-gate (1.9×) as well as bulk (100) InGaAs nMOSFETs (1.6×), which is...
In this work, the epitaxial graphene channel formed on 3C-SiC grown on a Si substrate backgate transistor was designed, fabricated and characterized for electronic and optoelectronic applications. Even though a significant amount of the gate leakage current is observed, the experimental results show the device works as an n-type transistor as well as an infrared photovoltaic transistor with the backgate...
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