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Immersion solder bumping, a mask-less and low cost processing, brings feasibility to the ultra-fine pitch chip-to- chip interconnection; however, how to make the uniform micro-bump is still a great challenge. In this paper, the uniform micro-bumps with very thin Sn-3.0Ag-0.5Cu (SAC305) solder layer on electroless nickel under bump metallization (UBM) are achieved. The test chips we used have 6,507...
To prevent potential yield loss, achieve TSV with higher aspect ratio, improve the bonding reliability, and reduce the process cost, a clamped through silicon via (C-TSV) interconnection for stacked chip bonding is proposed and developed in this paper. The metal cap on pad design can not only be a bonding layer for other stacked die on it, but also performs as a protection stopper for blind vias drilled...
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