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This work deals with an acquiring system dedicated to the measurement of the resonance frequency and the quality factor of organic piezoelectric resonators. These resonators consist of a free-standing cantilever and its non-released counterpart used to compensate electrical signals that are not due to mechanical behavior. The system uses a capacitive half-bridge with two AC voltages in opposite phases,...
Chips (5mm×5mm) containing 5 self-actuated/self sensed membranes have been fabricated by standard micromachining techniques starting with a Silicon-On-Insulator wafer and their dynamic behavior in liquid media was thoroughly considered by means of analytical modeling. An extended theoretical model on the basis of H. Lamb's seminal work is validated at the microscale and allows calculating...
Sensing platforms (5mm*5mm) containing 5 piezoelectric membranes have been fabricated by standard micromachining techniques starting with a Silicon-On-Insulator wafer. Each membrane (circular, with radius varying from 360 microns to 440 microns) could be individually actuated through a PZT 1-micron thick film and sensed either via the same piezoelectric patch or via two terminal piezoresistances (obtained...
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