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• The particles condition was able to be understood more precisely by using the new ISPM. • When there are exchange parts, the in-situ cleaning to emphasize gas viscosity can be effective • The in-situ cleaning condition be optimized by using the new ISPM. • In conclusion, one of the keys to achieve the particle management is using high-sensitivity ISPM.
New type defects which are nanometer-thickness stellar shape defects called as the stellar defects are reported. Since the stellar defects need the center particle and the water to form, we successfully have reduced the stellar defects by reducing the particles and humidity in the chamber. These very thin defects must be key issues in the processes that we have to control nanometer thickness.
In situ particle monitors (ISPM) have been used in the semiconductor industry for many years to monitor chamber condition before and after preventative maintenance. New improvements in particle detection technology combined with novel methods to remove particles from the chamber are proving that ISPM technology is a key component in the fight to improve product yields.
Wide hybridization that cannot be attained through conventional sexual crosses, can now be approached by somatic hybridization. Protoplasts of I. ensata and I. germanica were fused by electrofusion. For the selection of somatic hybrids, protoplasts of I. ensata which did not form colonies in protoplast culture and protoplasts of I. germanica which had regeneration ability for only albino shoot were...
In Iris germanica L., 'G1', 'Adorn' and 'Rococo', induction and proliferation of embryogenic calli were achieved by culture of leaf-base explants on Murashige and Skoog (MS) medium supplemented with 1 mg l−1 2,4-D, 1 mg l−1 kinetin, 200 mg l−1 casein hydrolysate, 250 mg l−1 proline, 30 g l−1 sucrose and 2.5 g l−1 gellan gum. Among these cultivars, however, only in 'G1' could a suspension culture be...
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