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In this paper, a piezoelectric diaphragm-based immunoassay chip was developed to simultaneously detect anti-Hepatitis B virus (HBV) and anti-alpha-fetoprotein (AFP). The chip was fabricated by micro-machining technology and consists of eight individual circular sensors with a diameter of 800μm. Hepatitis B surface antigen (HBsAg), Hepatitis C core antigen (HBcAg) and AFP as the probe molecules were...
This paper reports a novel microfabricated self-polarized piezoelectric biosensor array for simultaneous detection of 3 different types of antigens. This array consists of 8 individual circular sensors with a diameter of 1 mm and self-polarization because of the stress accumulated in the piezoelectric membrane during the fabrication process. HBsAg, HBcAg and alpha-Fetoprotein (AFP) were immobilized...
In this article, we report a novel method of fabrication of carbon-nanotube (CNT) enhanced piezoelectric membrane based biosensor. The piezoelectric membrane was fabricated by micro-machining technique and CNTs were synthesized on the backside of the membrane using thermal chemical vapor deposition. CNT has extraordinary electrochemical property and it possesses a hollow core and large specific surface...
This paper presents a mass sensitive biosensor utilizing a flexural vibration mode of a micromachined piezoelectric micro-diaphragm. The mass sensitivity of the diaphragm has been investigated with respect to the vibration modes. Theoretical analysis reveals that, for the same multilayer structure, the mass sensitivity is mainly determined by the mass per unit area of the diaphragm, the flexural mode...
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