The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
MEMS-based atomic clock is being studied by some investigators and we are proposing and developing a miniaturized pass rubidium atomic clock, in which Rb-87 lamp is the first microdevice of the system. To make the lamp give off light, noble gas is needed to fill the lamp. In this paper, we study the high frequency breakdown of noble gases in a MEMS-based Rb-87 lamp for miniaturized passive rubidium...
The micro-pump is an important drive component in the micro fluidics system. The piezoelectric drive is mainly employed as the actuator in MEMS devices. In this paper, a MEMS-based micro-pump with the attached PZT ceramic plate for drive is proposed. With the ANSYS software, a finite element model for this piezoelectrically driven micro-pump is established, and the vibration and coupled-field analyses...
In this paper, a kind of micro storage measurement unit (MSMU) is demonstrated, which is composed of MEMS accelerometers, multi-channel filters and adapters, a high-speed ADC, real data compression and controller ASIC, large volume memories, interfaces to a computer, etc. All these components are integrated in multi-chip modules-lamination (MCM-L) modules. The device can acquire information in very...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.