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An electromechanical circuit constructed from array-composites of capacitive-gap micromechanical resonators with differing frequencies, wired in closed-loop feedback with a single ASIC amplifier, provides a first MEMS-based multi-frequency oscillator generating simultaneous oscillation outputs in the vicinity of 61 MHz. The use of only one amplifier for all frequencies (as opposed to one for each...
A super-regenerative optical receiver detecting on-off key (OOK) modulated light inputs has been demonstrated that harnesses the radiation-pressure gain of a self-sustained electro-opto-mechanical oscillator (EOMO) to render its oscillation amplitude a function of the intensity of light coupled into the oscillator. Unlike previous electronic super-regenerative receivers, this rendition removes the...
The vector components of acceleration sensitivity Γ for a closed-loop oscillator referenced to a wine-glass disk array-composite resonator employing tiny (~92 nm) electrode-to-resonator capacitive transducer gaps were measured along axes perpendicular and parallel to the substrate to be Γvertical~13.6ppb/g and Γlateral~4.92ppb/g, respectively, which are on par with commercial quartz-based oscillator...
Substantial improvements in the far-from-carrier phase noise of oscillators referenced to stand-alone (as opposed to arrayed) capacitively transduced micromechanical disk resonators have been attained via the use of atomic layer deposition (ALD) to tune the electrode-to-resonator capacitive gaps. Specifically, ALD of about 30 nm of hafnia (HfO2) onto the surface of a released 60-MHz micromechanical...
A fully monolithic oscillator achieved via MEMS-last integration of low temperature nickel micromechanical resonator arrays over finished foundry CMOS circuitry has been demonstrated with a measured phase noise of -95 dBc/Hz at a 10-kHz offset from its 10.92-MHz carrier (i.e., output) frequency. The use of a side-supported flexural-mode disk resonator-array to boost the power handling of the resonant...
A new fabrication methodology that allows self-alignment of a micromechanical structure to its anchor(s) has been used to achieve vibrating radial-contour mode polysilicon micromechanical disk resonators with resonance frequencies up to 1.156 GHz and measured Q's at this frequency >2,650 in both vacuum and air. In addition, a 734.6-MHz version has been demonstrated with Q's of 7,890 and 5,160 in...
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