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Protected areas (PAs) are considered a cornerstone of biodiversity conservation, and the number and extent of PAs are expanding rapidly worldwide. While designating more land as PAs is important, concerns about the degree to which existing PAs are effective in meeting conservation goals are growing. Unfortunately, conservation effectiveness of PAs and its underlying determinants are often unclear...
Co-implantation of impurities such as carbon (C) has been proven to effectively reduce Transient Enhanced Diffusion (TED) of boron during annealing, enabling the formation of high-quality ultra-shallow junctions - a requirement for advanced-node semiconductor devices. Carbon dioxide (CO2) is traditionally used as the feed gas in implant tools for carbon implantation. Recently, carbon monoxide (CO)...
Carbon implant has become one of the major co-implant steps in the fabrication of advanced semiconductor devices due to its proven effectiveness in controlling and reducing Transient Enhanced Diffusion (TED) in ultra-shallow junction formation. Carbon dioxide (CO2) is still widely used as the feed gas for carbon implantation. However, it is well known that the high concentration of oxygen from CO2...
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