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A dual-stage piezoelectric stack is presented. It consists of three parts, which are used for high-speed actuation, vibration isolation, and long-range actuation. This dual-stage piezoelectric stack is a modified piezoelectric stack and appears as a single stack. The first resonance frequency of the original piezoelectric stack is 40 kHz. The 1-dB cutoff frequency of the original piezoelectric stack...
This paper presents a resonantly-driven and high-performing piezoelectric micropump, which is favorable for the fuel delivery system. The micropump consists of a resonance-driven vibrator, two simple polydimethylsioxane (PDMS) check valves and compressible spaces. The PDMS check valve increases the working stability and reduces the leakage rate. The performance of the micropump is significantly improved...
Triple-layer piezoelectric composite cantilevers possess good electromechanical conversion behavior with characteristics suitable for diverse applications, especially at low frequency. Thus, the use of such cantilevers has been extensively attempted in fabricating piezoelectric devices. This study reports on the accurate determination methods for the equivalent circuit parameters derived from the...
A triple-layer piezoelectric cantilever, with one elastic non-piezoelectric layer sandwiched between two piezoelectric layers, can be used in piezoelectric actuators, sensing elements, and piezoelectric energy harvesters. This study focuses on a dynamic admittance matrix that relates harmonically varying exciting parameters: an external tip force F and an applied voltage V to their response parameters;...
This paper presents an innovative micromachined PZT-based concave diaphragm resonator for bio-sensing. The residual stress free acoustic transducer with strong electromechanical coupling piezoelectric material can be effectively operated at resonant and vibration modes. With conformal coated parylene as the interface of the transducer and bio-molecules, the prototype device demonstrates a high resolution...
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