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This study presents a simple approach to improve the performance of CMOS-MEMS capacitive accelerometer by means of the post-CMOS metal electroplating process. The metal layer can be selectively electroplated on the MEMS structures at low temperature; and the thickness of metal layer can be easily adjusted by process. Thus, the performance of capacitive accelerometer (i.e., structure deformation, sensitivity)...
A robust design method applied to microgyroscope is presented which is of automation, efficiency and accuracy. The design target is to maximize the microgyroscope performance, within minimum variation of performance due to uncertainties caused by fabricating errors. Analysis of the tolerance is used to calculate the nominal value and the transmitted variation of the objective function, and the genetic...
This paper reports on an efficient robust optimal design of MEMS gyroscope. Proposed method uses sensitivity analysis considering the worst-case tolerance instead of statistical information about uncertainties. The robust optimal models based on macromodels consider electro-mechanical couple-field analysis. Monte Carlo analysis and physical level verification are also studied.
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