The Infona portal uses cookies, i.e. strings of text saved by a browser on the user's device. The portal can access those files and use them to remember the user's data, such as their chosen settings (screen view, interface language, etc.), or their login data. By using the Infona portal the user accepts automatic saving and using this information for portal operation purposes. More information on the subject can be found in the Privacy Policy and Terms of Service. By closing this window the user confirms that they have read the information on cookie usage, and they accept the privacy policy and the way cookies are used by the portal. You can change the cookie settings in your browser.
This paper reports on a novel design and process flow development for the fabrication of multi-contact silicon probes with monolithically integrated highly flexible ribbon cables on wafer level, based on the biocompatible polymer parylene-C. Compared to the state-of-the-art silicon probes, this novel development allows for the first time a floating implantation of these neural probes in the cortex...
A thermoelectric mass flow rate sensor on a 10 μm thick polyimide foil and its integration process on planar as well as non-planar surfaces has been developed. Flow sensors, fabricated by MEMS technology, usually have a height which is directly coupled to the wafer thickness (typically 525 μm or 380 μm). They are not bendable and an integration process is always complex...
This paper provides an overview of the development, fabrication and measurement results of a new type of silicon microphone. It mainly consists of a low stress nickel membrane with a nonlinear frequency response and a gold backplate electrode. The microphone can be used as condenser or electret microphone. A sensitivity of -64 dBV/Pa at 52 V bias was obtained with an air gap of 20 mum and membrane...
Set the date range to filter the displayed results. You can set a starting date, ending date or both. You can enter the dates manually or choose them from the calendar.