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A micromechanical displacement amplifier comprising two asymmetric resonator array composites coupled by a quarter-wavelength beam has been demonstrated that permits specification of gain factor by mere (digital) selection of an appropriate ratio of the number of resonators in an input array to that in an output array. Like the method, this displacement gain circuit is a key enabler for resoswitch-based...
A statistical comparison between the resonance frequency variations of stand-alone micromechanical disk resonators and mechanically-coupled array composites of them reveals that mechanically-coupled arraying of on-chip micromechanical resonators can very effectively enhance the manufacturing repeatability of resonance frequencies. In particular, twenty 3-disk resonator array-composites on a single...
A fully monolithic oscillator achieved via MEMS-last integration of low temperature nickel micromechanical resonator arrays over finished foundry CMOS circuitry has been demonstrated with a measured phase noise of -95 dBc/Hz at a 10-kHz offset from its 10.92-MHz carrier (i.e., output) frequency. The use of a side-supported flexural-mode disk resonator-array to boost the power handling of the resonant...
Vibrating polysilicon micromechanical ring resonators, using a unique extensional wine-glass-mode shape to achieve lower impedance than previous UHF resonators, have been demonstrated at frequencies as high as 1.2 GHz with a Q of 3,700, and 1.52 GHz with a Q of 2,800. The 1.2-GHz resonator exhibits a measured motional resistance of 1 MOmega with a dc-bias voltage of 20 V, which is 2.2 times lower...
A mechanical circuit-based approach for boosting the Q of a vibrating micromechanical resonator has been demonstrated whereby a low Q resonator is embedded into a mechanically-coupled array of much higher Q resonators to raise its functional Q by a factor approximately equal to the number of resonators in the array. Using this method, the low Q of 7,506 exhibited by a support-loss-limited 60- MHz...
VHF and UHF MEMS-based vibrating micromechanical resonators equipped with new solid dielectric (i.e., filled) capacitive transducer gaps to replace previously used air gaps have been demonstrated at 160 MHz, with Q's ~ 20,200 on par with those of air-gap resonators, and motional resistances (Rx's) more than 8times smaller at similar frequencies and bias conditions. This degree of motional resistance...
A reduction in phase noise by 13 dB has been obtained over a previous 60-MHz surface-micromachined micromechanical resonator oscillator by replacing the single resonator normally used in such oscillators with a mechanically-coupled array of them to effectively raise the power handling ability of the frequency selective tank. Specifically, a mechanically-coupled array of nine 60-MHz wine-glass disk...
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