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We designed, fabricated, and experimentally demonstrated a dynamically balanced z-axis MEMS vibratory gyroscope utilizing the concentrated suspension architecture. This architecture allows for a high degree of structural symmetry (degeneracy of modes), potentially enabling high precision Rate Gyroscopes (RG) and Rate Integrating Gyroscopes (RIG). The full dynamic balance of the design is enabled by...
We report on a new design approach for X-Y symmetric resonator, that can be mechanized as rate (RG) or rate-integrating gyroscope (RIG), with a single digit as-fabricated frequency split between the two mechanical out-of-phase operational modes. We explore concentration of critical mechanical elements (shuttle-spring-anchor modules) close to the center of the die to mitigate the effect of the fabrication...
We've developed a novel low-noise frontend LSI architecture with chopper stabilization technique combined with noise shaping ADC at chopping frequency for a capacitive MEMS accelerometer. Key features of the architecture are (1) a doubly modulated differential carrier input to MEMS, (2) a 2nd order sigma-delta ADC having a notch in its noise transfer function (NTF) at chopping frequency, and (3) a...
This paper describes a millimeter-sized electret vibrational energy harvester fabricated by a MEMS-based process for power generation enhancement. To increase current generation, we developed a new “slit-and-slider” structure with horizontal arrays and vertical protrusions. This structure enables us to increase an area and to narrow a gap of energy conversion in the limited size. The structure was...
This paper presents experimental proof of energy harvesting with MEMS-based vibrational devices. To clarify the effect of the coupling of vibration of MEMS devices and electrical field of electrets for current generation, a slit-and-slider structure was developed. This structure enables to combine the MEMS devices and electrets after their vibrational and electrical properties have been characterized...
We developed a dry process for the removal of gold oxide formed during oxygen plasma exposure. This technique features vacuum annealing at over 270degC to desorb oxygen from the gold oxide. This vacuum annealing eliminates the incubation period to achieve the conformal film growth.However, when gold and HCl(aq) soluble material such as aluminum coexist on the same surface or when there are fragile...
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