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Study of transient, instantaneous current during silicon micromachining using electrochemical spark process is carried out. Voltage excitation of three kinds namely, dc, Half wave rectified and ac are used to carve the micro channels. The transient and instantaneous process current is measured online and analyzed for each excitation. Micromachining and the surface topography results are presented...
A process for simultaneous surface treatment, micromachining and copper deposition on silicon wafer is reported here. The process addresses three issues viz. surface treatment, micromachining to form microchannels and subsequent copper deposition into this microchannel on silicon surface simultaneously. The suggested process is based on the electrochemical spark phenomenon. At a time, in its conventional...
Fabrication and analysis of microchannels on glass (coverslip) substrate are presented here. Microchannels are fabricated by using electrochemical spark micromachining process developed in house. The said process is evolved for machining of non-metals. The paper discusses in brief, the design and development of the experimental set-up along with the technique devised for the analysis of fabricated...
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