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A lift-off process is used to pattern metals that are nonetchable. The success is dependent on the degree of undercutting of the bottom sacrificial layer and various methods were briefly discussed. It is shown that single-layer negative-tone 7 μm thick MaN-1440 photoresist from Micro Resist Technology produces an excellent re-entrant profile for metal lift-off. The objectives for this paper will be...
In this paper, we present the design, modeling, fabrication, and measurement results of a microelectromechanical systems (MEMS)-based in-plane vibratory grating scanner driven by a two-degree-of-freedom (2-DOF) comb-driven circular resonator for high-speed laser scanning applications. Diffraction grating driven by a 2-DOF circular resonator has the potential to scan at large amplitudes compared with...
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