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Recently, periodic nanostructures with a rectangular profile have been widely used in the backside layer of solar cells to reduce the reflectance and to enhance the performance. In this paper, we design solar cells by applying two-dimensional periodic nanostructures with a trapezoidal profile as an antireflective layer. Through intensive simulations using rigorous coupled-wave analysis (RCWA), we...
Model-based infrared reflectrometry (MBIR) has been introduced recently for measuring deep trench structures in microelectronics. The success of this technique relies heavily on accurate modeling and fast calculation of the infrared metrology process, which still remains as one challenge. In this paper, we propose a modeling method named corrected effective medium approximation (CEMA) for accurate...
By taking the optical imaging of the internal micro-nanostructure of white beetle scales, a multilayer aperiodic model is presented in this paper to understand the complex natural formation mechanism of bright whiteness of a kind of white color beetle. Based on the proposed model, optical simulations of visible light reflectivity are conducted correlated with the variation of layer number, layer thickness...
Deep trench structures have been widely introduced to the IC and MEMS devices, such as bottle trench structures with an aspect-ratio of more than 50:1 has been adopted to form the capacitors on DRAM. The fabrication of this kind of structures challenges the traditional surface profile and shallow trench measurement technology. A polarized Fourier-transform infrared (FTIR) reflectance spectrometry...
Model-based infrared (MBIR) reflectance spectrometry has been introduced for characterization of the depth and profile of deep trench structures in dynamic random access memory (DRAM). Modeling the complex trench structure as a multilayer optical film stack with effective medium approximation (EMA) allows the determination of both trench depth and width from Fourier-transfer infrared (FTIR) reflectance...
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