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Hybrid integration of GaN and Si photonic devices is promising. Using a polymer bonding technique, GaN microring resonators are fabricated on Si substrate. Transmission characteristics of the GaN microring is measured.
We propose, design and fabricate here an electrostatically actuated continuous single-crystal-silicon membrane deformable mirror (DM) for astronomical observation. A 50μm air gap is generated a large between the mirror membrane and the electrode to get a large stroke. A DM with a 4mm×4mm mirror membrane and 8×8 underlying electrode array a is fabricated by combining Au-Si eutectic wafer bonding and...
We propose, design and fabricate here a novel electrostatically actuated continuous membrane deformable mirror for the next generation astronomical observation. To get a large stroke, a bimorph spring array is used to generate a large air gap between the mirror membrane and the electrode. A 3.4mm × 3.4 mm deformable mirror with a underlying 4×4 electrode array is fabricated by utilizing plasma activated...
We propose a method to generate spherical micro-mirror by anodic bonding. A flat silicon plate is bent with fulcrum to form a spherical shape by anodic bonding. Convex spherical surface is generated inside the fulcrum by the bending moment generated in circumference of micro-mirror. Due to the bent surface of silicon plate, a smooth spherical surface is obtained. The focal length is in the range form...
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