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This paper presents a novel tri-beam structured dog-bone resonance-mode micro-sensor, with a frequency readout piezoresistive Wheatstone-bridge independently located at the central beam for the detection of liquid-phase bio/chemical analyte. Compared with the conventional dual-beam dog-bone resonator, the tri-beam resonator has advantages in the elimination of signal feed-through and high-${Q}$ ...
Imitating on-site liquid-droplet analysis/assay with test-papers, a novel dog-bone resonator of tri-beam structure is proposed and developed for low-cost quick detection of trace amount biochemical liquid sample. With the specifically designed central beam, signal feed-through effect is effectively depressed by independent piezoresistive readout. Thereby, the new tri-beam resonator exhibits high-Q...
Presented is a novel silicon piezoresistive double-clamped beam with nano-thickness. It senses double-side surface-stress induced by molecular self-assembly or specific bio/chemical reaction. For the first time, both theoretical analysis and experiments results indicate that, when the thickness is down-scaled into nano-scale, the sensitivity of the clamped-beam piezoresistive self-sensing beam will...
A resonant micro-cantilever chemical sensor with integrated piezoresistive self-sensing function is presented. On the micro-cantilever surface, multi-wall carbon nanotubes (CNTs) are immobilized and modified with specific sensing groups. Owing to the high specific-surface-area of MWCNTs and high-effective sensitive groups, the sensor has been used to detect sub-ppb trace-level trinitrotoluene (TNT)...
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