Search results for: Michael Liehr
Plasma Processes and Polymers > 19 > 10 > n/a - n/a
IET Micro & Nano Letters > 2017 > 12 > 5 > 301 - 303
Vakuum in Forschung und Praxis > 29 > 1 > 40 - 49
Microelectronics Journal > 2015 > 46 > 5 > 377-382
Diamond & Related Materials > 2011 > 20 > 4 > 613-615