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In the Institute for Microstructural Sciences we have been developing a surface micromachining process for the fabrication RF MEMS on quartz substrates. In a previous paper we reported on the microwave performance of these switches [1]. In this paper we report on the characterization of the switch mechanical properties as a function of temperature. Real world electronic devices must meet a minimum...
While this work is completely concerned with a semiconductor switch, the origin of the requirement was based on hybrid superconductive/semiconductive electronics. High temperature superconductivity (HTS) allows planar microwave circuits to be built with performance levels not possible with conventional thin film materials. By combining HTS elements with semiconductor elements it is now possible to...
Amorphous fluoropolymer films have low dielectric constants and high chemical resistance and, so, have potential to be used as the insulator for high speed interconnects and as protection layers. Many applications would require high resolution patterning of the fluoropolymer film. We have found that these films are easily etched by reactive ion beam etching using an O2/Ar gas mixture. High etching...
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