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In this paper, we demonstrate the novel use of empty inclusions (i.e., “holes”) in bulk materials for engineering their acoustic properties (e.g., Young's modulus, Poisson's ratio and mass density) in order to tune and achieve optimal acoustical performance/characteristics. Inclusions have been demonstrated before to produce phononic bandgaps for wave trapping. We focus on the propagation characteristics...
This paper reports on an optimal support anchoring for bar-type BAW resonators. We demonstrate both theoretically and experimentally the implementation of long (in terms of acoustic wavelength) T-supports without compromising neither on the Q-factor nor on the electromechanical (pull-in) stability of the resonator. Compared to the more common straight supports, these long T-supports provide rigidity...
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