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The performance and threshold voltage variability of quasi-planar bulk MOSFETs are compared against those of conventional bulk MOSFETs, via three-dimensional (3-D) device simulations with gate line-edge roughness and atomistic doping profiles, at 25 nm gate length. The nominal performance of six transistor (6-T) SRAM cells is studied via 3-D simulation of full cell structures. Compact (analytical)...
A simple approach for manufacturing quasi-planar tri-gate bulk MOSFET structures is demonstrated and shown to be effective for reducing variation in 6T-SRAM read and write margins, in an early 28nm CMOS technology. With optimization of the pocket implant doses, quasi-planar bulk CMOS technology can facilitate voltage scaling. It also provides a means to achieve high yield with a notch-less 6T-SRAM...
Continued increase in variability is a challenge for SRAM scaling into sub-22 nm nodes, and presents an opportunity for the introduction of alternate technologies. In this work, the performance and threshold-voltage variability of vertical SOI finFETs are compared against those of planar fully depleted (FD) SOI MOSFETs with thin buried oxide, and are presented as an alternative to planar bulk CMOS...
The performance and threshold-voltage variability of vertical SOI FinFETs are compared against those of planar fully depleted SOI MOSFETs with thin buried oxide, via three-dimensional device simulation with atomistic doping profiles and gate line-edge roughness, for the 22 nm CMOS technology node (25 nm gate length). Compact modeling is then used to estimate six-transistor SRAM cell performance metrics...
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