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We firstly propose the concept of a frequency agile electromagnetic decoupling MEMS-based device. We experimentally show the feasibility of such an apparatus, and further work consists in cascading more than one decoupling device to achieve stronger electromagnetic decoupling values. The structure consists of a freestanding half-wavelength resonator mounted on a movable shuttle connected with large...
This letter presents a novel switchable composite right/left-handed (S-CRLH) metamaterial transmission line (TL) using MEMS switches. The proposed TL is based on a general CRLH TL with switchable capacitors and switchable shunt inductive stubs. The LH mode of the S-CRLH TL ranges from 7.5 GHz to 10.4 GHz. In these frequencies, the S-CRLH TL is able to switch from a negative phase response (phase lag)...
This paper reports on an RF MEMS package based on LTCC technology and gold-tin eutectic bonding, and also evaluates physical and RF characteristics of the proposed structure. The package consists of an LTCC lid substrate and a bottom substrate, and assembled by gold-tin layer (80 wt. % gold 20 wt. % tin) for hermetic sealing and low temperature bonding. The helium leak rate of 17 packages were 1.38...
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