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In this study, a micro-probe electrode array with independent interconnections through the substrate has been developed using LRS(Low Resistance Silicon) via and glass reflow process. The silicon vias have electrical resistance less than 2 Ω because the boron ion in the borosilicate glass wafer can diffuse into the LRS pillars during glass reflow process. The LRS wafer was etched with double DRIE...
We present a square glass microlens array for the improvement of light transfer efficiency of the fiber-optic neural probe. Optimal design has been derived using finite element analysis and fabricated microlens array has been analyzed.
We present a novel fabrication method of a two-dimensional forward optical scanner with integrated microlens. Glass microlens and electrical isolation blocks were integrated with silicon XY-stage using thermal reflow process. Measured scan angles in X and Y directions at resonance were ±4.9° and ±5.0°, respectively, at atmospheric pressure.
We firstly propose the concept of a frequency agile electromagnetic decoupling MEMS-based device. We experimentally show the feasibility of such an apparatus, and further work consists in cascading more than one decoupling device to achieve stronger electromagnetic decoupling values. The structure consists of a freestanding half-wavelength resonator mounted on a movable shuttle connected with large...
We report on the design, fabrication and experiment of a 2-DOF silicon scanning micromirror. We propose sloped electrodes to increase a maximum scan angle with a simple fabrication process. A delayed electroplating technique is adopted to fabricate the sloped profile of the electrodes over the patterned seed layer. We fabricated the 2-DOF scanning mirror which has different type of electrodes beneath...
Directional couplers have extensive applications in microwave circuits such as beamforming networks. Recently there has been growing scientific and commercial interest in microwave components for anti-crash and pre-crash systems in cars centered at 24 GHz. In this paper a novel suspended transmission-line 3 dB coupler at 24 GHz is presented. This circuit has been micromachined on a glass-quartz substrate...
This paper describes the influence of chip material on the separation efficiency in microchip electrophoresis using quartz, glass, polydimethylsiloxane (PDMS), polymethylmethacrylate (PMMA), and glass hybrid as the microchip material. The fabrication processes for each microchip are described in detail. We introduce a new fabrication method for a glass chip using amorphous silicon on the glass surface...
In this paper, we describe pull-in voltage measurement technique and results for the uniformity characterization of torsional micromirror arrays (MMAs). A simple measurement scheme using two illuminators and image processing was implemented. The MMAs were fabricated using two kinds of substrate; silicon on glass (SiOG) and silicon on insulator (SOI) wafers. Pull-in voltage distributions are presented,...
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