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This paper provides the first experimental demonstration of monolithically integrated piezoelectric MEMS RF switches with contour mode filters. Lead zirconate titanate (PZT) thin films are utilized to enable both low-voltage switch operation and filter tunability. This research leverages previous work using PZT actuators for low-voltage, wide-band switches and PZT transduced silicon resonators. The...
This paper details the design, fabrication, and measurement of a nano-scale mechanical switch. The switch uses lead zirconate titanate (PZT) actuators fabricated on silicon wafers and is intended to realize very low leakage complimentary mechanical logic elements. The switches were fabricated using an eleven step electron beam process using a novel dual electron beam photo resist technique to create...
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